| 摘要 |
PURPOSE:To enable to provide relatively long stroke and to improve resolution and stability of a finely moving mechanism which utilizes an integral elastic hinge used for manufacturing semiconductor related parts by providing a fixing mechanism for holding an article to be finely moved. CONSTITUTION:An electrostatic chuck 4 of a fixing mechanism has an electrode 4a and insulating layers 4b, 4c. A power source 6 is connected through a switch 5 between the electrode 4a and a substrate 2, thereby adsorbing and fixing the unit 1a to be finely moved and providing high position stability at the unit 1a, and even if a drive unit 3 slightly moves, the displacement can be absorbed by the elastic deformation in the course, and the unit 1a to be finely moved of the final stage is not moved. |
