发明名称 INDICATING DEVICE OF INSPECTION
摘要 PURPOSE:To display a necessary additional operation and to indicate adequately to each number of operation automatically by reading information on the inspection procedure of an object to be inspected, etc., and making a decision on an inspected result. CONSTITUTION:When the bar code BCD of an optional inspection unit IU is read by an input device 20 by the intervention of an operator, a control processor 40 reads relative operation history information out of a storage device to detect uninspected operations and also select an operation to be done firstly, and further displays the contents of the corresponding inspection procedure on a display 11 in selection format through a display controller 16. The operator confirms it through the transparent panel 12 of a touch panel type tablet to perform input operation as reguired. The control processor 40 indicates the addition of an inspection procedure, etc., according to the input data. Thus, this device indicates adequately to each operation number operating different inspection.
申请公布号 JPS58182565(A) 申请公布日期 1983.10.25
申请号 JP19820064070 申请日期 1982.04.19
申请人 HITACHI SEISAKUSHO KK 发明人 TAKAHASHI TSUTOMU;IWASAKI TAKEMASA
分类号 G01R31/26;G01R13/20;H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
地址