发明名称 PRODUCTION OF PYROELECTRIC TYPE INFRARED DETECTOR
摘要 PURPOSE:To improve the mass productivity of a detector, by forming stanchions having grooves at prescribed intervals longitudinally and transversely on the main plane of an original plate for a support base, and coating an adhesive agent thereon then placing a pyroelectric wafer on the same and dividing the pyroelectric wafer and the original plate for the support base in the positions passing the grooves. CONSTITUTION:Many stanchions 9 are beforehand formed by acid etching at prescribed intervals longitudinally and transversely on the top surface of an original plate 6' for a support base, and further, grooves 10 are formed in a cruciform shape in longitudinal and transverse directions to the respective stanchions 9. An epoxy adhesive agent 8 is coated only on the top surface of each stanchion 9 and a pyroelectric wafer 1' is placed thereon in a way that a rear electrode 3' is faced downward. The 1st front electrode 2a and the 2nd front electrode 2b are vacuum deposited on the surface of the wafer 1' after the adhesive 8 is allowed to cure by heating. Thereafter the wafer 1', the plate 6', etc. are diced in the positions passing the grooves 10.
申请公布号 JPS58182523(A) 申请公布日期 1983.10.25
申请号 JP19820066454 申请日期 1982.04.20
申请人 SANYO DENKI KK 发明人 TAMURA TAKU;IKEDA MASAMI;YAMAZAKI YOUICHI
分类号 G01J5/02;G01J5/34;H01L31/0264;H01L37/02 主分类号 G01J5/02
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