| 摘要 |
PURPOSE:To simplify a mechanism, to effectively arrange pellets on a glass plate, to improve the working efficiency and to improve the yield by elevationally moving a push rod provided at the adsorption hole of an adsorption nozzle and pushing to isolate the beam pellet. CONSTITUTION:When a pellet 3 which is adsorbed to an adsorption nozzle 4 reaches the position at 1.5 to 2mm. above the front surface of a glass plate 1, a vacuum conduit is shielded by a solenoid valve 15. Simultaneously, an atomospheric port 16 is opened. At the moment, a solenoid 11 is operated, and a push rod 12 is pressed. In his manner, the pellet 3 which is adsorbed to the end of an adsorption nozzle 4 is arranged forcibly to the plate 1 by the end of the rod 12. |
