| 摘要 |
PURPOSE:To suppress the temperature dependency of damping characteristics, by supporting an optical system with leaf springs between which a polymer compound having the damping characteristics is sandwiched. CONSTITUTION:The plate members 14 and 15 are made of, for example, 20mum stainless steel and 10mum beryllium copper, and the polymer compound layer 16 uses, for example, acrylic alkyl ester flexible resin and is, for example, 50mum thick. The polymer compound layer 16 is stuck not over the entire areas of the plate members 14 and 15, but partly. Thus, the temperature dependency of the damping characteristics is reduced. |
