| 摘要 |
PURPOSE:To obtain a bubble element which has large capacity and high functions by providing a circular or elliptic pattern of size greater than the pattern period of a transfer path as the corner pattern of a bending part of the transfer path. CONSTITUTION:The circular pattern 33 which has a diameter nearly double as great as the pattern period of the 1st and the 2nd transfer pattern periods is employed as the transfer path pattern 33 of the bending part where the 1st transfer path pattern 31 and the 2nd transfer path pattern 32 are connected to each other. In this case, the elliptic pattern 51 may be used. Thus, a transfer error is eliminated and excellent transfer margins are obtained. |
