| 摘要 |
PURPOSE:To miniaturize and speed up, and then enable to provide desired rocking conditions without providing a special collet rocking mechanism, by driving an arm which moves linearly with a drum type grooved cam. CONSTITUTION:The vertical movement of a collet is performed by being synchronized with the horizontal movement of the arm by a drive part which is not illustrated. A pellet 7 to be bonded is positioned at the position of attraction by the collet 1 by a pellet recognizing device and a transfer stage which are not illustrated. The pellet 7 adsorbed by the collet 1 is carried to a bonding position on a lead frame 8, and then rocked and fixed. When the cam curve of the cam 5 is put into the most suitable profile for the arm movement, it is possible to easily use an arm movement mechanism wherein the cam 5 is used, for scrubbing operations, since naturally the displacement of the cam becomes very small at a pellet mounting part, an arm stopping position. Accordingly, desired positional accuracy, rocking speed and the number of rocking times can be obtained only by the control of a drive stepping motor 4. |
