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发明名称
FORMATION OF REACTIVE ION-ETCHABLE STRUCTURE
摘要
申请公布号
JPS58181872(A)
申请公布日期
1983.10.24
申请号
JP19830039313
申请日期
1983.03.11
申请人
INTERN BUSINESS MACHINES CORP
发明人
NASANIERU KAARU ANDAASON;RARII YUUJIN DEIBII;BUINSENTO DEIIN GURABUDAARU;PATORITSUKU MAIKERU MATSUKAFUREI;BURUUSU AREN MIYUREI;BURUUSU UEIN RAITO
分类号
C23F4/00;C23F1/00;G03F7/00;G11B5/127;G11B5/133;G11B5/193;G11B5/31;H01F41/34
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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