| 摘要 |
PURPOSE:To make it possible to perform highly accurate centering which can be performed excellently, by holding a material to be centered among three or more gears, which are equally arranged on concentric circles, and pin and circular members such as a disk, which are linked to the gears with specified eccentricity being provided. CONSTITUTION:In order to operate a centering mechanism, a large gear 10 is rotated by a specified quantity manually or by a driving source 17 such as a motor, a circular member 15 is eccentrically rotated through a medium gear 10a and a small gear 11, and the circular member 15 is contacted with a substrate 16. Thus the centering of the substrate 16 is performed. The substrate 16 under the centering state is held by, e.g., a vacuum sucking head 18 on a rotary shaft of the large gear 10 and the medium gear 10a as illustrated in the Figure. Thereafter the circular member 15 is separated from the substrate 16 and the work can be finished. |
