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发明名称
THIN FILM FORMING METHOD
摘要
申请公布号
JPS58180014(A)
申请公布日期
1983.10.21
申请号
JP19820063381
申请日期
1982.04.16
申请人
FUJITSU KK
发明人
KATOU TAKASHI;TOYOKURA NOBUO
分类号
G02B6/13;B32B15/00;H01G4/10;H01L27/01;H01L29/92;H01L49/02;H05K3/00
主分类号
G02B6/13
代理机构
代理人
主权项
地址
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