发明名称 BONDING DEVICE FOR PELLET
摘要 PURPOSE:To form a gold-silicon eutectic alloy uniformly at all times, and to improve the yield of pellet bonding by providing a detecting terminal detecting the gold-silicon eutectic alloy shaped to the peripheral section of the pellet on scribing and controlling scribing time by signals from the detecting terminal. CONSTITUTION:The pellet 1 is held by a collet 2, and scribed while being pressed. A gold plated surface is detected by the detecting terminals 4, 5 before scribing, but the gold-silicon eutectic alloy is formed to the peripheral section of the pellet when starting scribing, and said gold-silicon eutectic alloy is detected by the detecting terminals 4, 5. The alloy is detected by the difference of glosses between gold and the gold-silicon eutectic alloy. When the gold-silicon eutectic alloy is detected, a scribing motor is controlled, and scribing is stopped.
申请公布号 JPS58180032(A) 申请公布日期 1983.10.21
申请号 JP19820063144 申请日期 1982.04.15
申请人 NIPPON DENKI KK 发明人 TAKANO HIDEAKI
分类号 H01L21/52;H01L21/58;(IPC1-7):01L21/58 主分类号 H01L21/52
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