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发明名称
使用自组装材料之二维图案化
摘要
以第一层内的第一自组装块体共聚物形成第一奈米级自对准自组装巢式线结构,其具有次微影宽度及次微影间隔且沿着第一方向延伸。用填充剂材料填充第一层,及在含有第一奈米级巢式线结构的第一层上方沈积第二层。以第二层内的第二自组装块体共聚物形成第二奈米级自对准自组装巢式线结构,其具有次微影宽度及次微影间隔且沿着第二方向延伸。将第一奈米级巢式线结构及第二奈米级巢式线结构的合成图案转印至在第一层下的底层,以形成在两个方向上含有周期性的结构阵列。
申请公布号
TW200935499
申请公布日期
2009.08.16
申请号
TW098100104
申请日期
2009.01.05
申请人
万国商业机器公司
发明人
达顿 堤摩西J;多利斯 布鲁斯B;金浩哲;瑞登斯 卡尔
分类号
H01L21/027(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
蔡玉玲
主权项
地址
美国
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