| 摘要 |
PURPOSE:To improve the output of a CO2 laser by flowing cooling medium to the outer periphery of a spiral laser tube, flowing laser gas which has circulating flow in the tube and recombining the dissociated gas at the downstream. CONSTITUTION:Laser gas which is introduced from an inlet 33 becomes circulating flow by the twisting angle and direction of blades 35 of an anode ring 25, tubular wall is flowed to a spiral laser tube 39 and a high speed turbulence flow is directed toward an anode ring 47. Cooling coil which flows between an outer tube 41 and the tube 39 becomes turbulent flow by spiral line. The turbulent flow degree of the gas is substantially equalized, thermal exchange efficiency is improved, and gas temperature is equalized. Accordingly, the decrease in the inversion distribution rate of the excited part is suppressed. Further, a catalyst unit 52 is provided at a gas exhaust port 51, gas is passed in high temperature state, dissociation of CO2 molecules is effectively suppressed, and the deterioration of the laser gas is prevented. According to this structure, the output of the CO2 laser oscillator of coaxial discharging excitation circulation type can be improved. |
