ELECTROSTATIC CAPACITANCE TYPE ROTARY DETECTOR

摘要

PURPOSE:To detect the rotation of a rotor to be detected with an excellent reliability while enabling miniaturization by building up an electrode and a detection circuit of a means of evaporation or the like on an insulation substrate arranged opposite to an electrostatic capcitance type rotary detector. CONSTITUTION:This detector is equipped with a first plate 140 having a semicondutor substrate on which first and second electrodes on the input side, a cycle signal supply circuit and a rotary signal generation circuit, a second plate 150 having a semiconductor substrate on which first and second electrodes on the output side and a signal transmission electrode opposite to the first plate and a rotary device for turning the second plate synchronizing the rotation of a rotor to be detected. This facilitates the miniaturization even regardless of increased number of electrode, which enabling the transmission of the signal to the rotary detection circuit without being affected by variation in the distributed capacitance of the wiring between the electrode and the rotary detection circuit. Thus, the rotation of the rotor is detected accurately with an excellent reliability.