摘要 |
A modular clean room is disclosed for maintaining an environment free of particulate contaminants comprising prefabricated modules which are detachably connected to form a self supporting structure having interior space through which filtered air is flowed. The modules include an air circulating module which supplies a flow of filtered air, a duct module in the form of a service corridor which provides a flow path for the recirculation of air within the interior space, and a floor module which provides a raised floor surface through which air can flow, to an underfloor space communicating with the duct module to recirculate filtered air within the room.
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