发明名称 MOVING TABLE DEVICE
摘要 PURPOSE:To allow the driving force for moving to act at the center of a slider in parallel with a guide shaft by a method wherein a feed screw is passed through the center of the slider in parallel with the guide shaft. CONSTITUTION:Two guide shafts 2 in parallel with each other are fixed at the both ends by fixing blocks 3 on a base 1, then the guide shaft 2 passes through the slider 4, and the static pressure slider by fluids 4 floats at the part of a bearing 5, accordingly moving is enables. A screw rod 6 is passes through the center between the guide shafts 2 in parallel with the guide shafts 2, and a nut 7 is fixed on the sliders 4 at the through part. The screw rod 6 is supported at the both ends by bearings 8 and 11, but the bearing 11 does not perfectly fix the screw rod 6 and has the clearance in the direction of radius. When the rotation of a motor 10 transmits through a coupling 9 resulting in the rotation of the screw rod 6, the sliders move in the direction of moving.
申请公布号 JPS58176935(A) 申请公布日期 1983.10.17
申请号 JP19820058305 申请日期 1982.04.09
申请人 TOKYO SHIBAURA DENKI KK 发明人 HORI KOUHEI;KUDOU AKIRA;ITOU TSUTOMU
分类号 H01L21/027;H01L21/30;(IPC1-7):01L21/30 主分类号 H01L21/027
代理机构 代理人
主权项
地址