| 摘要 |
PURPOSE:To detect the skew of a test pulse due to variance in wiring length from a driver output terminal part to a socket for an LSI to be tested by providing a comparator which makes a comparison regarding a reflected wave from the socket. CONSTITUTION:An LSI tester is equipped with a measurement control part 1, pulse generator 2, skew adjusting circuits 3a-3n, driver circuits 4a-4n, and comparators 6a-6n. Then, the drivers 4a-4n are driven to perform detection through the comparators 6a-6n which compare a reflected wave generated owing to the far end opening or short circuit of the socket 5 for the LSI to be tested with a reference voltage at driver output terminal parts A1-An. Thus, the skew of the test pulse due to variance in the wiring length from the driver output terminal parts A1-An to the socket 5. |
