| 摘要 |
In the present invention, provided is a manufacturing method of graphene grown on a substrate without using a metal catalyst. The manufacturing method comprises the following steps of: a) arranging a substrate which has a substrate layer; b) providing a carbon-containing gas, and performing low-pressure chemical vapor deposition (LPCVD); and c) growing graphene on the substrate layer without having a catalyst layer. The manufacturing method can directly manufacture graphene which comes in contact with a surface of the substrate on the substrate without using a metal catalyst. |
