PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of reducing deterioration in the detection accuracy of an acceleration detection element caused by the vibration of a vibration element and electronic equipment and a movable body having the physical quantity sensor.SOLUTION: A physical quantity sensor 1 includes: a vibration element to be driven to vibrate; an acceleration detection element for detecting acceleration; a semiconductor element 3 electrically connected to at least one of a vibration element 6 and an acceleration detection chip 4; and a package 2 having a storage space S1 for storing the vibration element 6 and the acceleration detection chip 4 and the semiconductor element 3. The acceleration detection chip 4 is fixed via the semiconductor element 3 to the package 2, and at least a part of the acceleration detection chip 4 is overlapped with the vibration element 6 in a plane view of the package 2.SELECTED DRAWING: Figure 1