摘要 |
PURPOSE:To obtain a long-lived sensor capable of detecting a long range of humidity exactly, by allowing to carry at least one of meta-, ortho-, and pyro- phosphates into the pores of a porous base. CONSTITUTION:Electrodes are formed on both sides of a base 1 having fine connected pores made of alumina or quartz material, connected in parallel to form comb-type counter electrodes 3, 3, and each terminal of the electrodes 3, 3 are connected to silver terminals 5, 5, and further, to lead wires 6, 6. The electrodes may be formed on one side, but a detection range can be enlarged by forming them on both side. The electrodes 3, 3 are printed with ruthenium oxide paste on the base 1, burned, washed, then impregnated with a soln. mixture of an aq. soln. of at least one of meta-, ortho-, and pyro-phosphate, and silicate soln., and dried. A sufficient amt. of phosphate is carried into the base 1 by repeating this operation, thus obtaining a long-lived sensor extremely small in hysteresis of humidification and dehumidification and superior in humidity detection characteristics in a wide range. |