发明名称 METHOD OF AND APPARATUS FOR ACTIVE ELECTROCHEMICAL WATER AND SIMILAR ENVIRONMENTAL CONTAMINANT ELIMINATION IN SEMICONDUCTOR AND OTHER ELECTRONIC AND ELCTRICAL DEVICES AND THE LIKE
摘要 This disclosure involves the employment of novel assemblies of electrode structures deposited upon, for example, strongly hygroscopic insulators and activated by small voltages to effect active electrolysis of adsorbed water as an effective getter for semiconductor and similar devices, with the process of preparation of the same being adapted either to enable modification of existing devices, or for supplementation to existing device manufacturing processes.
申请公布号 GB2075064(B) 申请公布日期 1983.10.12
申请号 GB19810021344 申请日期 1980.11.07
申请人 SAVERY J W 发明人
分类号 H01L23/02;C25B1/02;H01L21/306;H01L23/26;(IPC1-7):25B1/02;01L23/34 主分类号 H01L23/02
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