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发明名称
PROCESS FOR THE PHOTOTECHNICAL PRODUCTION OF RELIEF STRUCTURES
摘要
申请公布号
EP0019123(B1)
申请公布日期
1983.10.12
申请号
EP19800102260
申请日期
1980.04.25
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
RUBNER, ROLAND, DR.;KUHN, EBERHARD;AHNE, HELLMUT, DR.
分类号
G03F7/038;G03F7/008;H01L21/027;(IPC1-7):G03F7/00;G03C1/70
主分类号
G03F7/038
代理机构
代理人
主权项
地址
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