| 摘要 |
PURPOSE:To obtain a heat-sensitive element which enables to measure temperatures and integral times of heat treatment under the condition for actual manufacture at high accuracy, by laminating a thin film constituted of a low resistance metal and a high resistance metal. CONSTITUTION:Ti 102 as the high resistance metal and Al 103 as the low resistance metal are adhered on one main surface of an electric insulation substrate 101, and accordingly a thermo-sensitive element is constituted. By using this heat-sensitive element, the temperature of heat treatment and the time of heat treatment during the process of semiconductor manufacture which were so far difficult in measurement can be measured at high accuracy. |
