| 摘要 |
PURPOSE:To form a thin film detector stably, by forming a conductor film as a connecting layer continuously without interrupting the vacuum following formation of a ''Permalloy'' thin film and removing an unnecessary part of the connecting layer when the selectivity of etching of the ''Permalloy'' film is utilized to pattern a conductor pattern. CONSTITUTION:The first insulating film 23 is formed on a magnetic garnet layer 21 on a substrate 20. Films of ''Permalloy'' and aluminum are formed continuously on all of the surface of the film 23 by vacuum deposition to obtain a thin film ''Permalloy'' pattern 33 and a connecting layer 34'. The connecting layer 34' is removed selectively by etching to expose the pattern 33, and a conductor pattern 34 is formed, and the second insulating film 35 is stuck to all of the surface, and a ''Permalloy'' pattern 36 is patterned on this film 35. Thus, the thin film detector is formed stably without oxidizing the surface of the thin film ''Permalloy''. |
