MICRO PATTERN TYPE LASER DISPLACEMENT SENSOR DEVICE HAVING HIGH RESOLUTION

摘要

According to an aspect of the present invention, provided is the laser displacement sensor as a laser displacement sensor device including a laser displacement sensor and a signal processing device, which includes a code scale formed into a code with patterns wherein reflective surfaces and anti-reflective surfaces are alternatively arranged and displacing a measurement subject and an optical head generating and receiving laser beams. The optical head is a module part of the laser displacement sensor, exclusive of the code scale. The optical head includes: a laser generating device generating the laser beams; a collimating lens positioned in an upper side of the laser generating device and deflecting the laser beams into parallel beams; a projecting lens positioned in an upper side of the collimating lens, collecting the laser beams deflected by the collimating lens, and projecting the collected laser beams to the code scale; and an optical receiver receiving the laser beams reflected by the code scale. A focus of the output side of the projecting lens is positioned in a space between the projecting lens and the code scale. The purpose of the present invention is to provide a subminiature reflection type laser displacement sensor device with high resolution using the projected beams.