| 摘要 |
PURPOSE:To enable the detection of a correct optically cut image by holding the peak value of a laser spot image constant and detecting the shape of an object by an optical cutting method. CONSTITUTION:When a signal (a) for starting detection is put into a generating circuit 24 for a synchronizing signal, a galvanomirror driving circuit 23 generates a saw tooth wave (b), and a galvanomirror 7 rotates in a theta direction, then a laser spot is scanned in a direction x on the object to be detected and a spot image is formed on an image sensor 9 with the mirror 7. The laser spot moves vertically on the sensor 9 in accordance with the vertical change of the object. Therefore, the sensor 9 is scanned in the Z-axis direction by many times of trigger signals C during the scanning of the mirror 7 by a signal (b) for scanning the galvanomirror, whereby the optically cut image is detected two-dimensionally. |
