| 摘要 |
PURPOSE:To provide a titled distributor which miniaturizes and simplifies a matching box by supplying high-frequency electric power to plural sputtering sources by means of a common conductor connected to a matching circuit and a branch conductor having the length approximately equal to the length of the common conductor. CONSTITUTION:With a sputtering device in which a vacuum vessel 40 is put on a base plate 30 mounted with sputtering sources 31, 32, 33 and high-frequency electric power is supplied to said sources through a matching box 20 from a high-frequency power source device 10. The electric power supplied through a coaxial cable 11, a variable capacitor 21, a variable inductor 22 and a capacitor 23 is introduced with a common conductor 24, and is branched with the insulator part 64 at the forward end of a supporting bar 61 to branch conductors 25, 26, 27 having an approximately equal length, from which the electric power is further distributed uniformly to the sources 31, 32, 33 by means of a direct acting switch consisting of an air cylinder 66, an insulator 66, an electrode piece 67, etc. and high-frequency electrodes 31a, 32a, 33a. |
