WIDE RIM VIBRATORY RESONANT SENSORS

摘要

A gyroscope sensor is provided that comprises a resonator including a stem extending along an axis and a shell extending from the stem. The shell includes a hemispherical portion extending from the stem and a cylindrical portion extending from the hemispherical portion. The cylindrical portion includes an outer surface and an inner surface and terminates at an axial end surface that is perpendicular to the outer surface and the inner surface. The resonator further comprises an inner cylindrical substrate that extends along an axis and includes a set of inner electrodes arranged annularly about the axis, and a passage that extends along the axis through a central region of the inner cylindrical substrate. The stem extends through the passage to position the inner cylindrical substrate within the inner surface of the cylindrical portion of the resonator forming gaps between the set of inner electrodes and the inner surface.