| 摘要 |
PURPOSE:To obtain a highly stable crystal oscillator, by providing a sputtering mechanism for electrode film forming possible for minute adjustment in a package containing a crystal oscillator. CONSTITUTION:An electrode film made of gold is formed on both sides of a thickness slip oscillator 11 processed for spherical surface for one side, and the oscillator is contained into a package after being supported with a flexible supporting plate 15 made of phosphor bronze and external leads 16. The package consists of a metallic cap 13 and a base 14 made of an insulating material, the ridge is sealed with soldering for a seal construction. The leads 16 are sealed and fixed with a low melting point glass 17. A DC high voltage is impressed between two electrodes, an anode (the leads 16 via the plate 15) and a cathode (target electrode 18) of the crystal oscillator 11. The package is reduced into vacuum and replaced into gaseous argon. Accurate adjustement is preformed by allowing to collide argon ions from the anode accelerated with a negative DC bias voltage produced on a target 19 with the cathode, exciting target atoms and depositing sputter film (Au) on the oscillator 11. |
