| 摘要 |
PURPOSE:To permit a sample to be surely fixed onto a sample mount with such a shape as causing no interference on a probe card by a structure wherein a jig for holding the sample is limited in its thickness. CONSTITUTION:A plurality of rollers 31 are attached onto a cassette 30. These rollers 31 are held in position by springs 32 or the like. A wire 34 is stretched among the plural rollers 31 and a wafer is fixed by the wire 34. A stopper 33 and a pin 35 for positioning an orientation flat are also attached onto the cassette 30, but it is enough for them to have a height not greater than 3mm., typically ca. 1mm.. When used, the wire 34 is first stretched. This causes each roller 31 to be retreated via the spring 32, so that the wire 34 comes out of the wafer to permit exchange of wafer. The wafer may be fixed in a reverse manner as compared with the above. |
