| 摘要 |
PURPOSE:To obtain an anode target with large heat capacity in high strength at low cost, by covering a whole unit of graphite with metallic plates and concurrently applying the diffusive junction method for connection of the metallic plates to each other and the solder junction method for connection between the metallic plate and the graphite. CONSTITUTION:A target 1 is constituted by metallic plates 2a, 2b and graphite 3. While the plates 2a and 2b cover a whole unit of the graphite 3 and are butted by the method of diffusive junction or soldering in a part of the periphery (t) of the target 1. In the other modification example, to connect the graphite 3 to the plates 2a, 2b, a metallic layer 6 is provided intermediately. Here the metallic layer is thinly placed previously by the CVD method, and this metallic layer 6 is jointed to the plates 2a, 2b. |
