SLIT ANTENNA PROBE, AND APPARATUS AND METHOD FOR INSPECTING DEFECTS OF MULTI-JUNCTION SEMICONDUCTOR USING SAME

摘要

An apparatus for inspecting defects of a multi-junction semiconductor according to an embodiment of the present invention is disclosed, the apparatus characterized by comprising: a light source; a slit antenna probe; a parallel light radiation part; a light collection part; a light distribution part; a first light detection part; a second light detection part; an image signal generation part; and an image signal analysis part, wherein the slit antenna probe comprises: a guide part for guiding terahertz light generated by the light source; and a slit penetrating through an external space between the guide part and the slit antenna probe, wherein a reflection reduction structure for reducing the degree of reflection of the terahertz light passing via the guide part and passing through the slit is formed on the slit.