| 摘要 |
PURPOSE:To obtain a laser output light of high degree of homogeneity by a method wherein a plurality of laser amplifiers having laser rods of the same dimensions, and flash lamps are connected in cascade, and the pattern strain generated in the laser amplifier of even numbered turn is compensated by the laser amplifier of odd numbered turn. CONSTITUTION:In the rear stages of a laser oscillator 5, the first, second and third stage laser amplifiers 6-8 are arranged via compensating optical systems 9-11 which magnify a beam diameter to the value fitted to the dimensions of the laser rods 1 of each amplifier 6-8. These amplifiers 6-8 are respectively constituted of the laser rods 1 of the same dimensions, flash lamps 2, and packages 14 which contain a reflection cylinder 4, and the difference of light cources in a parallel direction and a vertical direction to the mount surface of the rods 1 is compensated by the compensating optical systems 9-11. The amplifiers 7 and 8 are arranged rectangularly, and make the flat determined by the rods 1 and the flash lamps 2 rectangular in optical manner, when it is viewed from the direction of transmission of laser light. Thus, the unsymmetric property of lens effect around the center axis of the rods 1 is compensated. |
