| 摘要 |
PURPOSE:To measure the amount of air leakage per unit time under specific pressure precisely in a short time, by measuring the suction amount or discharge amount of air directly while holding the internal pressure in a measured body container invariably constant. CONSTITUTION:The measured body container 10a containing a body 11 to be measured and an air pressure adjusting machine 40a capable of controlling the discharge or suction of air by an external signal are linked to each other by piping 60 without air leakage. The air pressure adjusting machine 40a consists of the pressure generation part 44 composed of, for example, a cylinder 45 and a cylinder rod 46, and a driving part 42 using a pulse motor 421. A pressure sensor 21a senses the pressure in the measured body container 10a and on the basis of its signal, a control part 30 is brought the air pressure adjusting machine 40a under feedback control. Thus, the pressure in the measured body container 10a is controlled continuously to reference air pressure during a measurement period. At this time, the flow rate of air sucked in or discharged from the air pressure adjusting machine 40a is measured to find the amount of air leakage. |
