| 摘要 |
PURPOSE:To obtain a titled optical fiber which has a high m.p. and a low coefft. of thermal expansion by forming a silicon metallic layer and the other metallic layer on an optical fiber of a quartz material, heating the same and forming a stable alloy layer. CONSTITUTION:A quartz base material 21 is melted in a spinning furnace 22, and is drawn. The resulted optical fiber 23 is conducted into a chemical vapor deposition device 24, where an Si metallic layer is formed on the fiber 23 by the reduction reaction of the SiH4 and gaseous H2 supplied to the device 24. The fiber is then taken up on a reel 26. An optical fiber 25 having the Si metallic layer is drawn out from the reel 26 and is introduced into a vacuum deposition device 31 having a fore chamber 32 and a post chamber 33, where a metallic layer selected among Co, Cr, Ni, Mo, W, Pd, Pt is formed and the fiber is taken up on a take-up reel 28. The reel 28 is put in a heating furnace and is heated, whereby the stable alloy layer of the Si and the metal is formed. |
