| 摘要 |
PURPOSE:To make possible the measurement of humidity, temperature and gas by one small-sized element, by using either one sensitive element for humidity, temperature or gas as a substrate and providing the separated electrodes on both sides of the substrate leaving a space and then, providing with remaining two materials bringing into contact with each one side of the separated electrodes. CONSTITUTION:For example, a humidity sensitive material such as apatite hydroxide is used for an element substrate 1 and porous electrodes 2a, 2b are provided on the one side of the substrate 1 by RuO2 or gold paste leaving a space and then, an SnO2 base gas sensitive porous ceramic material is placed overlapping parts of it with both electrodes each other. Porous electrodes 2c, 2b are provided on the other side of the substrate 1 by the same paste and a humidity sensitive film 4 made of Ni-Cu oxide base is placed overlapping parts of it with both electrodes each other. On occasion of detecting the humidity, lead wires 5a, 5b of the electrodes 2a, 2b and that of 5c, 5d of the electrodes 2c, 2d, are short-circuited and electric resistance between both sides of the substrate 1 is measured. On occasion of detecting the gas, the electric resistance between the electrodes 2a and 2b is measured and on occasion of detecting the temperature, the electric resistance between the electrodes 2c and 2d is measured. |
