| 摘要 |
PURPOSE:To know accurately a temperature of a material to be treated, by placing a dummy of the material to be treated formed by embedding a heat sensitive part on a susceptor similarly to the material to be treated and measuring its temperature. CONSTITUTION:A semiconductor wafer 1 is housed in recessed parts 2a of a susceptor 2 and also, a wafer dummy 3 having the same figure is housed in one of the parts 2a. A thermocouple part 41 of a thermocouple thermometer 4 is embedded in the dummy 3 and the temperature is displayed on a display part 43 through a lead wire 42 and the accurate temperature of the wafer 1 is known. |
