| 摘要 |
PURPOSE:To accurately discriminate a flaw at a high speed, by discriminating the flaw by selectively sending out a characteristic quantity data to a first or second auxiliary flaw candidate determination means unless a final discrimination result is obtained by the discrimination of a main flaw candidate designating means. CONSTITUTION:The surface state of an object 1 to be inspected is detected by a detection part 2 to be sent to a characteristic quantity extraction part 4 through a sampling part 3. A main flaw candidate determination part 20 uses the space distribution area data of a space distribution area data memory part 21 to judge an area containing flaw characteristic quantity data and discriminates a flaw kind to send the same to a flaw candidate discrimination part 22 which in turn sends out not only the discrimination result to an output part 7 but also the characteristic quantity data to either one of first and second auxiliary flaw candidate determination parts 23, 24 unless a final discrimination result is obtained. The determination part 23 performs discrimination using the lower rank space distribution data of the boundary and overlapped areas of the flaw kind of a lower rank data memory part 25 and the determination part 24 successively performs comparison and judgement on the basis of the memory value of a discrimination tree 26 to discriminate the kind of the flaw. By this method, the surface flaw of the object 1 to be inspected moving at a high speed can be discriminated.
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