MEASUREMENT OF ANISOTROPIC MAGNETIC FIELD FOR MAGNETIC THIN FILM

摘要

PURPOSE:To achieve an easy and accurate measurement of an anisotropic magnetic field of a magnetic thin film as performed in such a manner that a test wafer is pressed against a small hole provided in a cavity of an electron spin resonator by employing a test wafer with a metal film attached thereto. CONSTITUTION:A metal film 22 is formed on the surface of a magnetic thin film 15 on a substrate wafer 16 by evaporation of Au or like. A test wafer can be mounted easily on a wafer holder 13' opposed to a small hole 12 of a cavity 11 with a fixed spring 23 or the like without pressing a microwave reflection metal plate or the like. With such an arrangement, an anisotropic magnetic field of the magnetic thin film can be measured easily and accurately.