PLASMA TREATMENT PROCESS,申请号IE19830000747-传众专利搜索

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发明名称	PLASMA TREATMENT PROCESS
摘要
申请公布号	IE830747(L)	申请公布日期	1983.09.30
申请号	IE19830000747	申请日期	1983.03.31
申请人	FUJITSU LTD.	发明人
分类号	B01J19/08;C23C16/452;C23C16/455;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23C16/50	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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