| 摘要 |
PURPOSE:To form uniform and beautiful decorative films on a large number of substrates by disposing plural pieces of anode plates and cathode plates spacially so as to face each other. CONSTITUTION:Plural pieces of cathode plates 5 are disposed below and anode plates 6 above spacially so as to face each other in a vacuum vessel 2 provided with a gas supply port 3, an evacuating port 1 and heating means 8 for the walls of the vessel. Substrates 4 to be treated are placed on the respective plates 5 and the inside of the vessel 2 is evacuated. A reacting gas contg. gaseous metallic compds. is introduced therein to 0.1-10Torr, and 2,000-8,000V DC voltage is applied between both electrodes 5, 6 to form electric discharge spaces near the substrates 4; at the same time, the inside of the vessel 2 is heated to 200- 1,000 deg.C whereby films of metallic compds. are formed on the surfaces of the substrates 4. |
