| 摘要 |
PURPOSE:To simplify the feeding and discharging operations of the wafer to and from a vacuum chamber by a method wherein a stopper member is installed in an feeding tube and the discharging tube of the wafer in a freely expansible or contractible state. CONSTITUTION:A wafer feeding tube 21 is droopingly provided at the upper part of a high vacuum chamber 29, a wafer discharging tube 22 is provided droopingly at the lower part of the vacuum chamber. An exhaust tube 23 is connected to these tubes respectively, they are connected to a rotary pump through a valve 24, and an exhaust mechanism is constituted. Also, a plurality of concavities 26 are formed on the feeding pipe 21 located in the high vacuum chamber and on the inner wall surface which is connected to the discharge tube 22 in such a manner that the connected part of the exhaust tube 23 are pinched by the concavities 26. Sealing materials 27a-27d consisting of rubber material are installed at the concavities 26, and these sealing materials expand and block the tubes when the feeding tube 21 and the exhaust tube 22 are turned to decompressed state. Also, concavities 29 are opposingly provided on the inner surfaces located between the sealing members 27a-27d, stoppers 29a-29b having the same quality as the sealing members 27a-27d in the concavities 29, and they are expanded into the chamber 20 in case of a decompressed state. Thus, the wafers can be conveyed successively utilizing the expansion of the stopper members. |
