,申请号JP19820041747U-传众专利搜索

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发明名称
摘要
申请公布号	JPS58144831(U)	申请公布日期	1983.09.29
申请号	JP19820041747U	申请日期	1982.03.26
申请人		发明人
分类号	H01L21/30;G03F1/00;G03F1/54;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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