| 摘要 |
An apparatus for treating powdery materials utilizing microwave plasma, including means (51) for generatterial to be treated, means (123) for supplying said microwave generating means (51), a reaction vessel (57) disposed through said waveguide (52), means (120) for supplying said reaction vessel (51) with a powdery material to be treated, means (123) fur supplying said reaction vessel with a reaction gas, and means (136) for exhausting said reaction vessel (57), which is characterized by the improvement that said reaction vessel comprises a vertically elongated vessel (57) having a bottom above which a plasma generating area is formed, or said vertical reaction vessel (57) further comprises a bottom plate (58) horizontally supported in said reaction tube and so provided as to be vertically slidable within said reaction tube. With this apparatus a smaller amount of reaction gas with higher energy efficiency and with yet higher recovery for powdery treated materials is required and a continuous and uniform treatment without any special agitating means is provided. |
