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发明名称
LJUSKAENSLIGT SKIKTOEVERFOERINGSMATERIAL, OCH FOERFARANDE FOER FRAMSTAELLNING AV ETT FOTORESISTSCHA
摘要
申请公布号
FI833517(A0)
申请公布日期
1983.09.29
申请号
FI19830003517
申请日期
1983.09.29
申请人
HOECHST AKTIENGESELLSCHAFT
发明人
GEISSLER, ULRICH;HERWIG, WALTER;SIKORA, HELGA
分类号
G03F7/004;G03C1/76;G03C1/805;G03F7/09;G03F7/115;G03F7/34;(IPC1-7):G03C/
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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