ACTIVE GAS RESISTANT ROTARY PUMP OIL

摘要

PURPOSE:To provide the titled rotary pump oil containing a specified perfluoroalkoxy cyclic phosphonitrilic ester as effective ingredient and exhibiting excellent resistance to active gas such as halogen compd. CONSTITUTION:The rotary pump oil consists mainly of a compd. of the formula where (CF2CF2)m segment indicates single (CF2CF2) or a mixture of the segments with different chain lengths; in the former case, m is 2 and in the latter case, m indicates average number of (CF2CF2) repeating units which represents average length, and is 1.3-2.8; n is the number of PN repeating units in the phosphonitrile ring structure of compd. of the formula, and is 3-4 obtained by interaction of an oligomer (trimer and/or tetramer) of phosphonitrilic halide and fluoroalcohol.