| 摘要 |
PURPOSE:To obtain an electrophotographic receptor superior in photosenstivity, durability, etc., by forming on a conductive substrate a photoconductive amorphous Si layer having a layer region contg. O and an element of group V of the periodic table in a specified distribution, and an amorphous layer contg. Si, C, and halogen in due order. CONSTITUTION:A photoconductive amorphous layer 102 contg. Si as a main component is formed on a conductive substrate 101. In the layer 102, on the side of the substrate 101 a layer region 104 contg. an element of group V of the periodic table, such as P, in a uniform distribution, a layer region 103 contg. O in a distribution rich on the side of the substrate 101 and decreasing in the reverse side direction, and on the region 104 an amorphous Si layer region 105 contg. no elemnt of group V and no oxygen are formed. Then, an amorphous layer 106 contg. Si, C, and halogen is formed on the layer 102, thus obtaining a photoconductive material 100 high in photosensitivity and resolution, and superior in durability, etc. |
