发明名称 |
Fabrication of semiconductor modules with ceramic substrates and detection of residual glass |
摘要 |
To detect residual glass, such as appears at semiconductor chip pads and via holes during the fabrication of alumina/glass ceramic substrates that are used as supports for the semiconductor devices, the glass used for forming the ceramic substrates is doped with a rare earth oxide. During the manufacturing process, the ceramic structures are irradia
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申请公布号 |
US4406844(A) |
申请公布日期 |
1983.09.27 |
申请号 |
US19810313072 |
申请日期 |
1981.10.19 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FROOT, HOWARD A. |
分类号 |
C04B35/111;G01N21/64;H01L21/48;H01L21/66;H01L23/15;H05K1/02;H05K1/03;H05K3/12;(IPC1-7):C09K1/10 |
主分类号 |
C04B35/111 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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