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发明名称
PROCESS CONTROLLER USING RESONANT ELEMENT DRIVEN BY PNEUMATIC PRESSURE
摘要
申请公布号
JPS58161822(A)
申请公布日期
1983.09.26
申请号
JP19830029620
申请日期
1983.02.25
申请人
FOXBORO CO:THE
发明人
FUIRITSUPU KEI BOTSUJI
分类号
G01D5/42;G01L9/00
主分类号
G01D5/42
代理机构
代理人
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地址
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