发明名称 WIRE BONDING APPARATUS
摘要 The wiring system has a device(13) to detect markers marking the two sets of connections. The device detects the distance of the markers from reference planes. Positional corrections are made before a connection point in one set is connected to its corresponding connection point in the other set. Alignment is accomplished by moving a viewfinder in a specified manner. In one arrangement the marker mounting allows viewfinder location point to move along a number of consecutive positions(8-0,8-1,8-3) around the corners of a rectangle in order to find the correct location.
申请公布号 KR830001955(A) 申请公布日期 1983.09.26
申请号 KR19800001999 申请日期 1980.05.22
申请人 HITACHI CO.,LTD. 发明人 TAKASUKI NOBUHIRO;KYOMASU RYUICHI
分类号 H01L21/60 主分类号 H01L21/60
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